Seleniyumu, nkibikoresho byingenzi bya semiconductor nibikoresho fatizo byinganda, bifite imikorere yayo bigira ingaruka kumasuku yayo. Mugihe cyo gutunganya vacuum distillation, umwanda wa ogisijeni nimwe mubintu byingenzi bigira ingaruka nziza kuri seleniyumu. Iyi ngingo itanga ikiganiro kirambuye kuburyo butandukanye nubuhanga butandukanye bwo kugabanya umwuka wa ogisijeni mugihe cyo kweza seleniyumu ukoresheje vacuum.

I. Kugabanya Ibiri muri Oxygene mu cyiciro cyo Kwitegura

1. Isukura ryibanze ryibikoresho bito

Seleniyumu mbisi isanzwe irimo umwanda utandukanye, harimo na oxyde. Mbere yo kwinjira muri sisitemu yo gutandukanya vacuum, hagomba gukoreshwa uburyo bwo koza imiti kugirango ikureho okiside yo hejuru. Ibisubizo bikoreshwa mubisanzwe byogusukura harimo:

• Koresha aside hydrochloric acide (5-10% yibanze): Gushonga neza okiside nka SeO₂
• Ethanol cyangwa acetone: Ikoreshwa mugukuraho umwanda
• Amazi ya Deionised: Kwoza inshuro nyinshi kugirango ukureho aside isigaye

Nyuma yo gukora isuku, gukama bigomba gukorwa munsi yumwuka wa inert (urugero, Ar cyangwa N₂) kugirango wirinde kongera okiside.

2. Ubuvuzi mbere yo kugabanya ibikoresho byibanze

Kugabanya kuvura ibikoresho bibisi mbere yo guta vacuum bishobora kugabanya cyane ogisijeni:

• Kugabanya hydrogène: Shyiramo hydrogène nziza cyane (ubuziranenge ≥99.999%) kuri 200-300 ° C kugirango ugabanye SeO₂ kuri seleniyumu yibanze
• Kugabanya Carbothermal: Kuvanga ibikoresho bya seleniyumu hamwe nifu ya karubone isukuye cyane nubushyuhe kugeza kuri 400-500 ° C munsi ya vacuum cyangwa ikirere cya inert, bigatera reaction C + SeO₂ → Se + CO₂
• Kugabanya sulfide: Imyuka nka H₂S irashobora kugabanya okiside ya seleniyumu ku bushyuhe buke

II. Igishushanyo nogukora Optimisiyoneri ya sisitemu ya Vacuum

1. Guhitamo no Kugena Sisitemu ya Vacuum

Ibidukikije-vacuum ni ngombwa mu kugabanya ibirimo ogisijeni:

• Koresha ikwirakwizwa rya pompe + imashini ya pompe ikomatanya, hamwe nicyuho cyanyuma kigera byibuze 10⁻⁴ Pa
• Sisitemu igomba kuba ifite umutego ukonje kugirango wirinde gukwirakwiza imyuka ya peteroli
• Ihuza ryose rigomba gukoresha kashe yicyuma kugirango wirinde gusohoka kashe ya rubber
• Sisitemu igomba gukorerwa bihagije (200-250 ° C, amasaha 12-24)

2. Kugenzura neza Ubushyuhe nubushyuhe

Uburyo bwiza bwo guhuza ibice:

• Ubushyuhe bwo gusibanganya: Igenzurwa mu ntera ya 220-280 ° C (munsi ya seleniyumu itetse ya 685 ° C)
• Umuvuduko wa sisitemu: Ikomeza hagati ya 1-10 Pa
• Igipimo cy'ubushyuhe: 5-10 ° C / min kugirango wirinde guhumeka bikabije
• Ubushyuhe bwa zone yubushyuhe: Yagumishijwe kuri 50-80 ° C kugirango habeho seleniyumu yuzuye

3. Ikoranabuhanga rya Distillation Multi-Stage

Gutandukanya ibyiciro byinshi birashobora kugabanya buhoro buhoro ibirimo ogisijeni:

• Icyiciro cya mbere: Kurandura bikabije kugirango ukureho imyanda myinshi ihindagurika
• Icyiciro cya kabiri: Kugenzura neza ubushyuhe bwo gukusanya igice kinini
• Icyiciro cya gatatu: Ubushyuhe buke, gutinda buhoro kugirango ubone ibicuruzwa byera cyane
  Ubushyuhe butandukanye burashobora gukoreshwa hagati yicyiciro cyo guhuza ibice

III. Ingamba zo Gufasha

1. Ikoreshwa rya tekinoroji yo kurinda gazi

Nubwo ikorera mu cyuho, kwinjiza neza gaze ya inert isukuye ifasha kugabanya ogisijeni:

• Nyuma yo kwimura sisitemu, uzuza argon-yera cyane (ubuziranenge ≥99.9995%) kugeza 1000 Pa
• Koresha uburyo bwo kurinda gazi ya dinamike, ukomeza kwinjiza make ya argon (10-20 sccm)
• Shyiramo gazi isukura cyane murwego rwa gaze kugirango ukureho ogisijeni isigaye nubushuhe

2. Kwiyongera kwa Oxygene Scavengers

Ongeramo ogisijeni ikwiye kubikoresho fatizo birashobora kugabanya neza ogisijeni:

• Icyuma cya magnesium: Gukomera cyane kuri ogisijeni, gukora MgO
• Ifu ya Aluminium: Irashobora gukuraho icyarimwe ogisijeni na sulferi
• Ntibisanzwe ubutaka bwisi: nka Y, La, nibindi, hamwe ningaruka nziza zo gukuraho ogisijeni
  Ingano ya ogisijeni isukuye ni 0.1-0.5 wt% yibikoresho fatizo; amafaranga arenze arashobora kugira ingaruka kuri seleniyumu

3. Ikoranabuhanga ryashongeshejwe

Kurungurura seleniyumu yashonze mbere yo kuyungurura:

• Koresha quartz cyangwa ceramic muyunguruzi ifite pore ingana na 1-5 mm
• Kugenzura ubushyuhe bwo kuyungurura kuri 220-250 ° C.
• Irashobora gukuraho ibice bikomeye bya oxyde
• Akayunguruzo kagomba kubanza guteshwa agaciro mu cyuho kinini

IV. Nyuma yo Kuvura no Kubika

1. Gukusanya ibicuruzwa no gutunganya

• Ikusanyirizo rya kondenseri rigomba kuba ryarateguwe nkuburyo butandukanye kugirango ibintu byoroshye bigarurwe mubidukikije
• Ibikoresho bya seleniyumu byakusanyirijwe bigomba gupakirwa mumasanduku ya argon
• Ubuso bwo hejuru bushobora gukorwa nibiba ngombwa kugirango ukureho ibice bya oxyde

2. Kugenzura imiterere yububiko

• Ibidukikije bibikwa bigomba guhora byumye (aho ikime ≤-60 ° C)
• Koresha ibice bibiri bifunze bipfunyitse byuzuye gaze ya inert yuzuye
• Basabwe ubushyuhe bwo kubika munsi ya 20 ° C.
• Irinde urumuri kugirango wirinde fotokatike ya okiside

V. Kugenzura Ubuziranenge no Kwipimisha

1. Ikoranabuhanga ryo gukurikirana kumurongo

• Shyiramo isesengura rya gaze isigaye (RGA) kugirango ukurikirane ogisijeni igice cyigihe
• Koresha ibyuma bya ogisijeni kugirango ugenzure imyuka ya ogisijeni mu myuka irinda
• Koresha infrarafurike ya sprosroscopi kugirango umenye impanvu zo kwinjiza ibintu bya Se-O

2. Isesengura ryibicuruzwa byarangiye

• Koresha uburyo bwa gaz inert fusion-infrared uburyo bwo kwinjiza kugirango umenye ogisijeni
• Secondary ion mass spectrometry (SIMS) kugirango isesengure ikwirakwizwa rya ogisijeni
• X-ray yifoto yerekana amashanyarazi (XPS) kugirango imenye imiterere yimiti

Binyuze mu ngamba zuzuye zasobanuwe haruguru, umwuka wa ogisijeni urashobora kugenzurwa munsi ya 1 ppm mugihe cyo gutunganya vacuum distillation ya seleniyumu, byujuje ibisabwa kugirango seleniyumu isukure cyane. Mu musaruro nyirizina, ibipimo ngenderwaho bigomba gutezimbere hashingiwe ku miterere y'ibikoresho n'ibisabwa ku bicuruzwa, kandi hagomba gushyirwaho uburyo bukomeye bwo kugenzura ubuziranenge.