Umusemburo wa 6N (≥99.9999% ubuziranenge) ultra-nyinshi-isukuye ya sulfuru isaba gusibanganya ibyiciro byinshi, adsorption yimbitse, hamwe no kuyungurura ultra-isuku kugirango ikureho ibyuma byanduye, umwanda kama, hamwe nuduce. Hano hepfo ni inzira-nganda ihuza inganda zangiza, microwave ifashwa no kwezwa, hamwe na tekinoroji ya nyuma yubuvuzi.
I. Gutegura ibikoresho bito no gukuraho umwanda
1. Guhitamo Ibikoresho Byoroheje no Kwitegura
- Ibisabwa.
- Gushonga Microwave:
Amazi meza ya sulfuru atunganyirizwa mumashanyarazi ya microwave (inshuro 2,45 GHz, ingufu za 10-15 kW) kuri 140-150 ° C. Microwave iterwa no guhinduranya dipole ituma gushonga byihuse mugihe ubora umwanda kama (urugero, ibimera). Igihe cyo gushonga: iminota 30-45; ubujyakuzimu bwa microwave: cm 10-15 - Gukaraba Amazi:
Amazi ya sulfure avangwa n'amazi ya deioniyo (résistivite ≥18 MΩ · cm) ku kigereranyo cya 1: 0.3 muri reakteri ivanze (120 ° C, umuvuduko wa bar 2) mu gihe cy'isaha 1 kugirango ikureho umunyu ushonga amazi (urugero, sulfate ya amonium, sodium chloride). Icyiciro cyamazi kiratunganijwe kandi kigakoreshwa inshuro 2-3 kugeza igihe ≤5 μS / cm.
2. Multi-Stage Adsorption na Filtration
- Isi ya Diatomaceous / Ikoreshwa rya Carbone Adsorption:
Isi ya Diatomaceous (0.5-1%) hamwe na karubone ikora (0.2-0.5%) byongewe kuri sulfure yashongeshejwe mukurinda azote (130 ° C, gukurura amasaha 2) kuri adsorb ibyuma hamwe nibisigara bisigaye - Ultra-Precision Filtration:
Ibyiciro bibiri byo kuyungurura ukoresheje titanium yungurujwe muyungurura (0.1 μ m pore ingano) kuri ≤0.5 MPa ya sisitemu. Nyuma yo kuyungurura ibice: ≤10 ibice / L (ubunini> 0.5 μ m).
II. Inzira-Icyiciro cya Vacuum Ikwirakwizwa
1. Kurandura Ibanze (Gukuraho Ibyuma Byanduye)
- Ibikoresho.
- Ibipimo bikora:
- Kugaburira Ubushyuhe.
- Ikigereranyo cyo Kugarura: 5: 1-8: 1; inkingi hejuru yubushyuhe bwo hejuru ≤ ± 0.5 ° C.
- Ibicuruzwa.
2. Secondary Molecular Distillation (Gukuraho Umwanda Wumubiri)
- Ibikoresho.
- Gutandukana kw'umwanda:
Ibinyabuzima bitetse cyane (urugero, thioethers, thiophene) bihumeka kandi bikimurwa, mugihe umwanda utetse cyane (urugero, polyaromatike) uguma mubisigisigi kubera itandukaniro ryinzira yubusa. - Ibicuruzwa.
3. Igice cya gatatu Gutunganya (Kugera kuri 6N Ubuziranenge)
- Ibikoresho.
- Gutandukanya:
Gukoresha coefficient zo gutandukanya (K = Csolid / CliquidK=Cbikomeye /Camazi), zone 20-30 inyura ibyuma byibanda (As, Sb) kumpera ya ingot. Iherezo rya 10-15% bya ingunguru ya sulferi irajugunywe.
III. Nyuma yo Kuvura hamwe na Ultra-Isukuye
1. Gukuramo Ultra-Yera
- Ether / Carbone Tetrachloride Gukuramo:
Amazi ya sufuru avanze na chromatografi yo mu rwego rwa ether (1: 0.5 igipimo cyijwi) ifashijwe na ultrasonic (40 kHz, 40 ° C) muminota 30 kugirango ikureho ibinyabuzima bya polarike. - Gusubirana:
Molecular sie adsorption hamwe na distillation ya vacuum igabanya ibisigazwa bya solvent kugeza ≤0.1 ppm.
2. Ultrafiltration na Ion Guhana
- PTFE Membrane Ultrafiltration:
Amazi ya sulfure ayungurura akoresheje 0,02 μ m PTFE ya membrane kuri 160–180 ° C hamwe na MPa 0.2. - Ion Guhana:
Chelating resin (urugero, Amberlite IRC-748) ikuraho ppb urwego rwicyuma cya ion (Cu²⁺, Fe³⁺) ku gipimo cya 1-2 BV / h.
3. Ultra-Isuku Ibidukikije
- Inert ya Atomisiyasi:
Mu cyumba cy’isuku cyo mu cyiciro cya 10, sulfure yashongeshejwe hamwe na azote (0.8-1.2 MPa umuvuduko) muri granules ya 0.5-1 mm (ubushuhe <0.001%). - Gupakira:
Igicuruzwa cyanyuma gifunzwe na vacuum muri firime ya aluminiyumu munsi ya ultra-pure argon (≥99.9999% yera) kugirango wirinde okiside.
IV. Ibikorwa by'ingenzi byingenzi
| Icyiciro | Ubushyuhe (° C) | Kureka | Igihe / Umuvuduko | Ibikoresho |
| Gushonga kwa Microwave | 140–150 | Ibidukikije | 30-45 min | Imashini ya Microwave |
| Gukaraba Amazi | 120 | 2 bar | Isaha 1 / ukwezi | Imashini ikangura |
| Gukwirakwiza molekile | 300–320 | ≤0.1 Pa | Gukomeza | Inzira ngufi-Inzira ya molekulari |
| Gutunganya Zone | 115–120 | Ibidukikije | 1-3 mm / h | Uturere twa Horizontal |
| PTFE Ultrafiltration | 160–180 | ≤0.2 MPa | 1-2 m³ / h itemba | Ubushyuhe bwo hejuru |
| Azote | 160–180 | 0.8–1.2 MPa | 0,5-1 mm granules | Umunara wa Atomisation |
V. Kugenzura Ubuziranenge no Kugerageza
- Gukurikirana Isesengura Ryanduye:
- GD-MS (Glow Discharge Mass Spectrometry): Itahura ibyuma kuri ≤0.01 ppb.
- Isesengura rya TOC: Gupima karubone kama ≤0.001 ppm.
- Ingano yubunini bugenzura:
Gutandukanya Laser (Mastersizer 3000) ituma D50 itandukana ≤ ± 0,05 mm. - Isuku yo hejuru:
XPS (X-ray Photoelectron Spectroscopy) yemeza uburebure bwa okiside yo hejuru ≤1 nm.
VI. Umutekano n’ibidukikije
- Kwirinda guturika:
Imashini zitanga umuriro hamwe na sisitemu ya azote ikomeza urugero rwa ogisijeni <3% - Kugenzura ibyuka bihumanya ikirere:
- Imyuka ya aside: Ibyiciro bibiri NaOH scrubbing (20% + 10%) ikuraho ≥99.9% H₂S / SO₂.
- VOC: Rotor ya Zeolite + RTO (850 ° C) igabanya hydrocarbone itari metani kugeza kuri mg10 mg / m³.
- Gutunganya imyanda:
Kugabanuka k'ubushyuhe bwo hejuru (1200 ° C) bigarura ibyuma; ibisigazwa bya sulferi bisigaye <0.1%.
VII. Ibipimo byubukungu-Ubukungu
- Gukoresha Ingufu.
- Tanga umusaruro: Gusubirana kwa sufuru ≥85%, igipimo gisigaye <1.5%.
- Igiciro: Igiciro cy'umusaruro ~ 120.000–180.000 CNY / toni; igiciro cyisoko 250.000-350.000 CNY / toni (icyiciro cya semiconductor).
Ubu buryo butanga 6N sulfure kubafotora ba semiconductor, substrate ya III-V, nibindi bikorwa byateye imbere. Igenzura-nyaryo (urugero, isesengura ryibanze rya LIBS) hamwe na ISO yo mucyiciro cya 1 cyo kwisukura byerekana ubwiza buhoraho.
Ibisobanuro
- Reba 2: Ibipimo byo kweza Amazi Yinganda
- Reba 3: Ubuhanga buhanitse bwa Filtration mubuhanga bwa chimique
- Reba 6: Igitabo gikubiyemo ibikoresho byinshi byo gutunganya
- Reba 8: Semiconductor-Grade Porotokole Yumusaruro
- Reba 5: Gukwirakwiza Vacuum
Igihe cyo kohereza: Apr-02-2025