Gukora sulfure ya 6N (≥99.9999% ubuziranenge) bisaba ko ikoreshwa mu gutunganya ibintu mu byiciro byinshi, kuyishyira mu buryo bwimbitse, no kuyisukura cyane kugira ngo ikureho ibyuma bito, imyanda y’ibinyabuzima n’uduce duto. Hasi aha hari inzira y’inganda ihuza ikoranabuhanga ryo gutunganya ibintu mu buryo bukoresha icyuma gishyushye, gutunganya ibintu hakoreshejwe microwave, hamwe n’ikoranabuhanga rigezweho nyuma yo kuyitunganya.
I. Gutunganya ibikoresho mbere yo kubitunganya no kubikuraho umwanda
1. Guhitamo ibikoresho fatizo no kubitunganya mbere
- Ibisabwa: Ubuziranenge bwa sulfur bw'ibanze ≥99.9% (urwego rwa 3N), imyanda yose y'icyuma ≤500 ppm, ingano ya karuboni y'umwimerere ≤0.1%.
- Gushonga hakoreshejwe mikoroonde:
Sulfure ikaranze itunganywa muri micro-reactor (umuvuduko wa 2.45 GHz, ingufu za 10–15 kW) kuri 140–150°C. Guhinduranya dipole biva muri micro-wave bituma ishonga vuba mugihe ibora imyanda y'ibinyabuzima (urugero: imvange ya tar). Igihe cyo gushonga: iminota 30–45; ubujyakuzimu bwo kwinjira muri micro-wave: cm 10–15 - Gukaraba amazi adakoreshejwe:
Sulfure ishongeshejwe ivangwa n'amazi yakuwemo ayoni (resistivity ≥18 MΩ·cm) ku gipimo cya 1:0.3 cy'uburemere mu cyuma cyavugutiwe (120°C, umuvuduko wa bar 2) mu gihe cy'isaha 1 kugira ngo ikuremo imyunyungugu ishongesha mu mazi (urugero: ammonium sulfate, sodium chloride). Igice cy'amazi gikurwamo amazi hanyuma kigakoreshwa mu gihe cy'amasaha 2-3 kugeza igihe conductivity igeze kuri ≤5 μS/cm.
2. Gushyira amazi mu byiciro byinshi no kuyayungurura
- Diatomaceous Earth/Activated Carbon Adsorption:
Ubutaka bwa diatomaceous (0.5–1%) na activated carbon (0.2–0.5%) byongerwa muri sulfure ishongeshejwe hifashishijwe uburinzi bwa azote (130°C, kuvanga amasaha 2) kugira ngo bikurure ibyuma n'ibisigazwa by'ibinyabuzima. - Kuyungurura neza cyane:
Gushungura ibice bibiri hakoreshejwe filters za titanium (ingano y'imyenge ya 0.1 μm) ku gitutu cya sisitemu ya ≤0.5 MPa. Umubare w'uduce twa nyuma yo kuyungurura: ≤10 uduce / L (ingano >0.5 μm).
II. Uburyo bwo gusohora imashini zikoresha vacuum mu byiciro byinshi
1. Gukuraho umwanda mu byuma (Primary distillation)
- Ibikoresho: Inkingi yo gutogosha ya quartz ifite icyuma kitagira umugese cya 316L (amasahani ≥15 y’imitekerereze), ifu ikoresha umwuka ≤1 kPa.
- Ibipimo by'imikorere:
- Ubushyuhe bw'ibiryo: 250–280°C (sulfure irabira kuri 444.6°C iyo ishyushye mu kirere; vacuum igabanya ubushyuhe bwo kubira kugeza kuri 260–300°C).
- Igipimo cyo kugaruka mu mubiri: 5:1–8:1; ihindagurika ry'ubushyuhe bwo hejuru y'inkingi ≤±0.5°C.
- Igicuruzwa: Ubuziranenge bwa sulfur bufunze ≥99.99% (urwego rwa 4N), imyanda yose y'icyuma (Fe, Cu, Ni) ≤1 ppm.
2. Gukuraho umwanda mu buryo bwa kabiri (Gukuraho umwanda mu binyabuzima)
- Ibikoresho: Imashini igabanya ubushyuhe bw'ibyuka ifite uburebure bwa mm 10–20, ubushyuhe bw'ibyuka 300–320°C, isuku ≤0.1 Pa.
- Gutandukana n'umwanda:
Ibintu by’umwimerere bishyuha cyane (urugero: thioethers, thiophene) bihinduka umwuka bigakurwa mu kirere, mu gihe imyanda ishyuha cyane (urugero: polyaromatics) iguma mu bisigazwa bitewe n’itandukaniro ry’inzira y’uturemangingo. - Igicuruzwa: Ubuziranenge bwa sulfure ≥99.999% (urwego rwa 5N), karuboni y'umwimerere ≤0.001%, igipimo cy'ibisigazwa <0.3%.
3. Gutunganya Akarere ka Tertiary (Kugera ku Isuku rya 6N)
- Ibikoresho: Imashini itunganya ahantu hatambitse ifite uburyo bwo kugenzura ubushyuhe bw'ahantu henshi (± 0.1°C), umuvuduko w'urugendo rw'ahantu 1–3 mm/h.
- Gutandukanya:
Gukoresha ibipimo byo gutandukanya (K = Csolid / CliquidK=Cbikomeye/Camazi), akarere ka 20–30 gashyira ibyuma bivanze (As, Sb) ku mpera y'ingot. 10–15% bya nyuma by'ingot ya sulfure birajugunywa.
III. Gutunganya nyuma yo kuvurwa no gusukura cyane
1. Gukuramo ibintu bidafite isuku cyane
- Icukurwa rya Ether/Carbon Tetrachloride:
Sulfure ivangwa na ether yo mu rwego rwa chromatographic (igipimo cya 1:0.5 cy'ubunini) hifashishijwe ikoranabuhanga rya ultrasonic (40 kHz, 40°C) mu gihe cy'iminota 30 kugira ngo ikureho ibintu bito byo mu bwoko bwa polar organics. - Kugarura ibikoresho by'amashanyarazi:
Gukoresha uburyo bwa molekile mu gusya no gusya ibintu bivamo umwuka bigabanya ibisigazwa by’ibinyabutabire kugeza kuri ≤0.1 ppm.
2. Kuyungurura cyane no guhinduranya ioni
- PTFE Membrane Ultrafiltration:
Sulfure ishongeshejwe inyuzwa mu membrane za PTFE za 0.02 μm kuri 160–180°C na ≤0.2 MPa. - Resins zo Guhindura Ion:
Amaresine ya Chelating (urugero, Amberlite IRC-748) akuraho iyoni z'icyuma zo mu rwego rwa ppb (Cu²⁺, Fe³⁺) ku gipimo cya 1–2 BV/h.
3. Gutunganya ibidukikije bisukuye cyane
- Atomu ya Gazi Idakora:
Mu cyumba cyo gusukura cya Class 10, sulfure ishongeshejwe ishyirwamo azote (igitutu cya 0.8–1.2 MPa) mu duce duto twa 0.5–1 mm (ubushuhe <0.001%). - Gupakira mu cyuma gishyushye:
Umusaruro wa nyuma upfundikirwa mu cyuma gifunga neza cya aluminiyumu hakoreshejwe argon idafite ubuziranenge bwinshi (≥99.9999% by'ubuziranenge) kugira ngo hirindwe ko ogisijeni ikomeza kwiyongera.
IV. Ibipimo by'ingenzi by'imikorere
| Icyiciro cy'Ibikorwa | Ubushyuhe (°C) | Igitutu | Igihe/Umuvuduko | Ibikoresho by'ingenzi |
| Kushonga kwa Microwave | 140–150 | Ikirere | Iminota 30–45 | Akonjesha ya Microwave |
| Gukaraba amazi adakoreshejwe | 120 | Akabari 2 | Isaha 1/igare | Reactor ya Stirred |
| Guhindura molekile | 300–320 | ≤0.1 Pa | Ibihoraho | Distiller ya Molecular ikoresha inzira ngufi |
| Gutunganya uturere | 115–120 | Ikirere | 1–3 mm/isaha | Umuvumbuzi w'ahantu hatambitse |
| Gutunganya PTFE mu buryo bwa Ultrafiltre | 160–180 | ≤0.2 MPa | Uruzi rwa metero 1–2/h | Akayunguruzo k'ubushyuhe bwinshi |
| Atomu ya azote | 160–180 | 0.8–1.2 MPa | Uduce duto twa mm 0.5–1 | Umunara wa Atomisation |
V. Igenzura ry'Ubuziranenge n'Isuzuma
- Isesengura ry'Indwara z'Ibimenyetso:
- GD-MS (Isuzuma ry'Ubunini bw'Ingufu mu Kurekura Umucyo): Isuzuma ibyuma kuri ≤0.01 ppb.
- Isesengura rya TOC: Ipima karuboni organic ≤0.001 ppm.
- Kugenzura Ingano y'Ibice by'Uduce:
Uburyo bwo gukwirakwiza urumuri bwa laser (Mastersizer 3000) butuma D50 ihinduka ≤± 0.05 mm. - Isuku yo hejuru:
XPS (X-ray Photoelectron Spectroscopy) yemeza ubunini bwa okiside y'ubuso ≤1 nm.
VI. Umutekano n'Igenamigambi ry'Ibidukikije
- Kwirinda guturika kw'ibisasu:
Imashini zipima umuriro zikoresheje infrared na azote zituma amazi azura zigumana urugero rwa ogisijeni <3% - Kugenzura imyuka ihumanya:
- Imyuka ikomoka kuri aside: Gusukura NaOH mu byiciro bibiri (20% + 10%) bikuraho ≥99.9% H₂S/SO₂.
- VOC: Rotor ya Zeolite + RTO (850°C) igabanya hydrocarbons zitari methane kugeza kuri ≤10 mg/m³.
- Gusubiramo imyanda:
Kugabanya ubushyuhe bwinshi (1200°C) bigarura ibyuma; ibisigazwa bya sulfure biri munsi ya 0.1%.
VII. Ibipimo by'ikoranabuhanga n'ubukungu
- Ikoreshwa ry'ingufu: 800–1200 kWh amashanyarazi na toni 2–3 z'umuyaga kuri toni ya 6N sulfure.
- Umusaruro: Kugarura sulfure ≥85%, igipimo cy'ibisigazwa <1.5%.
- Ikiguzi: Igiciro cy'umusaruro ~ 120.000–180.000 CNY/toni; igiciro cy'isoko 250.000–350.000 CNY/toni (urwego rwa semiconductor).
Ubu buryo butanga sulfure ya 6N yo gukoresha mu gupima imiterere y’ingufu za semiconductor, substrates za III-V, n'izindi porogaramu zigezweho. Gukurikirana mu buryo bwa nyabwo (urugero, isesengura ry’ibanze rya LIBS) no gusuzuma icyumba cyo gusukura cya ISO Class 1 bitanga ubuziranenge buhamye.
Ibisobanuro by'amajambo y'epfo
- Icyitonderwa cya 2: Amahame ngenderwaho yo gutunganya isukura ry'inganda
- Icyitonderwa cya 3: Ubuhanga bwo kuyungurura buhanitse mu buhanga mu by'ubutabire
- Icyitonderwa cya 6: Igitabo cy'amabwiriza agenga itunganywa ry'ibikoresho bisukuye cyane
- Icyitonderwa cya 8: Amabwiriza agenga ikorwa ry'ibinyabutabire mu rwego rwa semiconductor
- Icyitonderwa cya 5: Gutunganya imashini zisukura mu cyuma gishyushya amazi
Igihe cyo kohereza: Mata-02-2025